This unit is designed to combine the cover glass
with the coated substrate and consists basically
of two main components – a vacuum chamber and
a UV-source. The UV source s mounted to the outside
of the inert atmosphere and the vacuum chamber is
integrated into the inertgas enclosure. A quartz
window and a shutter system in the bottom of the
vacuum chamber allow the UV light to irradiate the
pressurized glasses.
The advantage of this tool is the highly uniform pressure
that is applied to the glasses during the curing process.
The pressure is solely applied to the device by gas pressure
– no mechanical pressure is used as in most other
process tools.
It serves two distinct functions – pressing the glasses
together and curing the UV-resin. Both processes run parallel
so that a fully encapsulated and leak tight device is
the result of this process. The leak rate of the encapsulated
device is strongly dependent on the type of UV-resin.
For best results MBRAUN recommends low permeation sealants
from DELO
Industrial Adhesives.
Detailed features:
• UV irradiation from bottom
• Integrated in vacuum chamber
• Designed for glovebox integration
• Mechanical Pin Alignment
• Applicable for a maximum substrate size of 200x200
mm
Parameters which can be set by the operator:
• Irradiation (curing) time
• Initial pressure
• End pressure
